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253 pages • missing pub info (editions)
ISBN/UID: 9781118062777
Format: Hardcover
Language: English
Publisher: Wiley-Scrivener
Publication date: 28 May 2013
Description
Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD...
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253 pages • missing pub info (editions)
ISBN/UID: 9781118062777
Format: Hardcover
Language: English
Publisher: Wiley-Scrivener
Publication date: 28 May 2013
Description
Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD...